The earthquake hit Taiwan’s southern Chiayi county at 12.17am local time.
Workers returned to the plants several hours after the quake.
TSMC is now checking for damage.
EARTHQUAKE strikes the Center of Taiwan!
He added that equipment at major plants in the science park is designed to stop during earthquakes.
There have been previous earthquakes in Taiwan that impacted the global technology supply chain.
These halts were necessary to inspect facilities and ensure employee safety, causing short-term disruptions in production.
